Parts For Sale MATTSON 515-21084-00 MATTSON 515-21084-00 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details MATTSON 515-21084-00 Manufacturer MATTSON Part Number 515-21084-00 Description Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 6.0 US Other MATTSON Parts 57200021 FRONT LINER PLATE INSTALLATION POSSIBLE ON: MATTSON STEAG 100-00468 O-Ring, Teflon Encapsulated VITON IPA CAN 544-00016-00 PLATE GRID RF REV.A 58500012 Quartz Pins 13mm for Cooling Station 152-00008-00 O-RING, SPLICED, CASSETTE CHMBR Rev : 02 Unit: PAK 141-00004-00 MATTSON 200 SHUTTLE HOUSING BEARING 913-10053-00 O-RING, 18.955ID, x .210CS, SILC Rev : 02 Unit: PAK 263-13677-04 933-14007-00 MOTOR,DC,ROBOT EXT & ROTATE 263-08768-00 304-16239-00 914-11002-00