Parts For Sale MATTSON 515-21084-00 MATTSON 515-21084-00 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details MATTSON 515-21084-00 Manufacturer MATTSON Part Number 515-21084-00 Description Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 6.0 US Other MATTSON Parts 58600046 ROTATION TRAY 12, 3mm DOUBLE PACKAGE INSTALLATION POSSIB ... 1007699 mattson 1007699 bracket 152-00008-00 O-RING, SPLICED, CASSETTE CHMBR Rev : 02 Unit: PAK 58900160 QUARTZ TILTING TRAY SEE SAW 8 456-00226-16 O-RING, 0.612 ID X .103CS, VITON Rev : E Unit: PAK 58500029 PLATE LINER PLATE TOP SPACER 1001469 Shield O-Ring 263-23201-00 17000018 IGBT GATE-FUSE BOARD 451111 Mattson Rear Chamber Assembly, New Power Plasma, Unit, B ... 505-12577-00 37500003 Filter Micro Inline gas -, Wafergard II