Parts For Sale MATTSON 5102-0020 MATTSON 5102-0020 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details MATTSON 5102-0020 Manufacturer MATTSON Part Number 5102-0020 Description CIRCUIT BRKR 1POLE 1A Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other MATTSON Parts 58600091 Quartz Pins 255-12307-00 Mattson 255-12307-00 ATM robot Z-axis interface PCB board 263-15571-01 263-06185-00 COIL ASSY, SILVER PLATED 933-14007-00 MOTOR,DC,ROBOT EXT & ROTATE 263-16758-00 3006203 CABLE ASSY,SWITCH,TOP PLATE COOL INTLK 400-00283 HARD DRIVE 57600004 GAS DISTRIBUTOR TYPE R INSTALLATION POSSIBLE ON: MATTSON ... 57600014 plate gasdistribution-, rotation back 914-11002-00