Parts For Sale MATTSON 5102-0020 MATTSON 5102-0020 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details MATTSON 5102-0020 Manufacturer MATTSON Part Number 5102-0020 Description CIRCUIT BRKR 1POLE 1A Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other MATTSON Parts 456-01027-26 O-RING,1.859 ID X .139W,FLORO 152-00001-00 cassette door chamber 58700015 Quartz Tube 8" For Ripple 152-00008-00 O-RING, SPLICED, CASSETTE CHMBR Rev : 02 Unit: PAK 456-14479-00 913-10030-00 O-RING, 1.049 ID X .103CS, VITON Rev : 02 Unit: PAK 544-00034-00 SHIELD, FARADAY - ASPEN II / MATTSON 915-12014-00 304-16239-00 914-11002-00 27300071 O-ring 5.8 * 1.5 Vi563