Parts For Sale MATTSON 263-21681-02 MATTSON 263-21681-02 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details MATTSON 263-21681-02 Manufacturer MATTSON Part Number 263-21681-02 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 US Other MATTSON Parts 062-00003-00 PIN, HEATER Rev : 01 Unit: EA 418894 RFPP RF30S RF Generator, Mattson, 418894 913-10066-00 O-Ring Kalrez 914-14002-00 913-11003-00 Seal Lip 405-05230-00 57600004 GAS DISTRIBUTOR TYPE R INSTALLATION POSSIBLE ON: MATTSON ... 451111 Mattson Rear Chamber Assembly, New Power Plasma, Unit, B ... 456-01027-06 57200021 FRONT LINER PLATE INSTALLATION POSSIBLE ON: MATTSON STEAG 58900068 Wafer Tray 6"