Parts For Sale MATTSON 263-21681-02 MATTSON 263-21681-02 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details MATTSON 263-21681-02 Manufacturer MATTSON Part Number 263-21681-02 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 US Other MATTSON Parts 515-12031-00 913-11001-00 SEAL LIP FLANGED SHUTTLE LIFT SHAFT 456-01027-03 RING, 23.2 ID X.210W, FLORO Rev : D Unit: PAK 062-00003-00 PIN, HEATER Rev : 01 Unit: EA 456-01027-07 O-RING, 0.612 ID X .103CS, VITON Rev : D Unit: PAK 57600002 GAS DISTRIBUTOR TYPE T INSTALLATION POSSIBLE ON: MATTSON ... 544-00023-00 CAP QUARTZ TUBE 933-14007-00 MOTOR,DC,ROBOT EXT & ROTATE 913-11003-00 Seal Lip 57600004 GAS DISTRIBUTOR TYPE R INSTALLATION POSSIBLE ON: MATTSON ... 303-21220-00 Pin Lift Wafer