Parts For Sale MATTSON 263-05984-05 MATTSON 263-05984-05 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details MATTSON 263-05984-05 Manufacturer MATTSON Part Number 263-05984-05 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 US Other MATTSON Parts 456-05784-02 O-RING,27.80 ID X .210CS,FLORO 418894 RFPP RF30S RF Generator, Mattson, 418894 235-08790-00 KIT,RETROFIT,ROBOT SEAL HSG ASY 263-09456-00 Kit, Computer CPU Card 041-00048-00 SHUTTLE ROTATE CLAMP 456-01027-07 O-RING, 0.612 ID X .103CS, VITON Rev : D Unit: PAK 302-06607-00 SPRING SLIT DOOR 913-11003-00 Seal Lip 57600004 GAS DISTRIBUTOR TYPE R INSTALLATION POSSIBLE ON: MATTSON ... 451111 Mattson Rear Chamber Assembly, New Power Plasma, Unit, B ... 040-00003-00 57200021 FRONT LINER PLATE INSTALLATION POSSIBLE ON: MATTSON STEAG