Parts For Sale MATTSON 263-05984-05 MATTSON 263-05984-05 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details MATTSON 263-05984-05 Manufacturer MATTSON Part Number 263-05984-05 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 US Other MATTSON Parts 152-00001-00 cassette door chamber 58700015 Quartz Tube 8" For Ripple 544-00034-00 SHIELD, FARADAY - ASPEN II / MATTSON 263-06185-00 COIL ASSY, SILVER PLATED 456-01027-04 O-RING, CHAMBER TO HIVAC 456-00226-94 T C O-RING 0.06 ID X 0.04 CS 7100-5174-02 PCB, OVEN, CONTROL 304-16239-00 58700001 Quartz Insulating Tube 914-11002-00 27300071 O-ring 5.8 * 1.5 Vi563