Parts For Sale MATTSON 263-05984-04 MATTSON 263-05984-04 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details MATTSON 263-05984-04 Manufacturer MATTSON Part Number 263-05984-04 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 2.0 US Other MATTSON Parts 421-544-806 BOTTOM CHAMBER SMALL 913-11001-00 SEAL LIP FLANGED SHUTTLE LIFT SHAFT 913-10031-00 O-RING, 1.987 ID X .103CS, VITION Rev : 02 Unit: PAK 913-10066-00 O-Ring Kalrez 141-00065-00 SENSOR SPRING PIN BALL 933-14007-00 MOTOR,DC,ROBOT EXT & ROTATE AST3000 QUARTZ PIN BEARING AST3000, LOT OF 19 040-00011-00 062-00021-00 PUSHER HEATER 141-01000-00 1000113 1000113 PCB ASSY ANALOG O/P UEI 914-11002-00