Parts For Sale MATTSON 263-05984-04 MATTSON 263-05984-04 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details MATTSON 263-05984-04 Manufacturer MATTSON Part Number 263-05984-04 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 2.0 US Other MATTSON Parts 152-00001-00 cassette door chamber 58700015 Quartz Tube 8" For Ripple 510-08660-00 CAP, VAC, 100PF 152-00008-00 O-RING, SPLICED, CASSETTE CHMBR Rev : 02 Unit: PAK 544-00034-00 SHIELD, FARADAY - ASPEN II / MATTSON 914-14010-00 VALVE,3 PORT,SINGLE SOLENOID 405-24106-00 262-00002-00 ment Arm Spindle Mattson 3005803 304-16239-00 914-11002-00 27300071 O-ring 5.8 * 1.5 Vi563