Parts For Sale MATTSON 263-05984-03 MATTSON 263-05984-03 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details MATTSON 263-05984-03 Manufacturer MATTSON Part Number 263-05984-03 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 US Other MATTSON Parts 041-00049-00 515-12031-00 58600091 Quartz Pins 456-14479-00 255-12307-00 Mattson 255-12307-00 ATM robot Z-axis interface PCB board 533-02735-00 HTR,JKT,ISO 57600002 GAS DISTRIBUTOR TYPE T INSTALLATION POSSIBLE ON: MATTSON ... 913-10054-00 O-RING, VITON 5099202236 933-14007-00 MOTOR,DC,ROBOT EXT & ROTATE 3006203 CABLE ASSY,SWITCH,TOP PLATE COOL INTLK 57600014 plate gasdistribution-, rotation back 914-11002-00