Parts For Sale MATTSON 263-05984-02 MATTSON 263-05984-02 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details MATTSON 263-05984-02 Manufacturer MATTSON Part Number 263-05984-02 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 2.0 US Other MATTSON Parts 58600046 ROTATION TRAY 12, 3mm DOUBLE PACKAGE INSTALLATION POSSIB ... 913-11001-00 SEAL LIP FLANGED SHUTTLE LIFT SHAFT 913-10053-00 O-RING, 18.955ID, x .210CS, SILC Rev : 02 Unit: PAK 299-20000-00 Mattson, ASSY, PCB ICP PLASMA SENSE, A2, p/n 299-20000-00 262-00002-00 ment Arm Spindle Mattson 933-14007-00 MOTOR,DC,ROBOT EXT & ROTATE 913-11003-00 Seal Lip 27300160 Gasket separate -, Pneumatics block 910-13007-00 931-14001-00 303-02685-00 58900068 Wafer Tray 6"