Parts For Sale MATTSON 062-00022-00 MATTSON 062-00022-00 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details MATTSON 062-00022-00 Manufacturer MATTSON Part Number 062-00022-00 Description PUSHER HEATER Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other MATTSON Parts 58600046 ROTATION TRAY 12, 3mm DOUBLE PACKAGE INSTALLATION POSSIB ... 152-00001-00 cassette door chamber 58700015 Quartz Tube 8" For Ripple 58600091 Quartz Pins 152-00018-00 STRIP, DELRIN BACK CHAMBER 913-10030-00 O-RING, 1.049 ID X .103CS, VITON Rev : 02 Unit: PAK 544-00034-00 SHIELD, FARADAY - ASPEN II / MATTSON 913-10053-00 O-RING, 18.955ID, x .210CS, SILC Rev : 02 Unit: PAK 304-16239-00 493-05457-00 914-11002-00 27300071 O-ring 5.8 * 1.5 Vi563