Parts For Sale MATTSON 062-00022-00 MATTSON 062-00022-00 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details MATTSON 062-00022-00 Manufacturer MATTSON Part Number 062-00022-00 Description PUSHER HEATER Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other MATTSON Parts 58600046 ROTATION TRAY 12, 3mm DOUBLE PACKAGE INSTALLATION POSSIB ... 141-00063-00 PIN, BRKT 58600091 Quartz Pins 152-00018-00 STRIP, DELRIN BACK CHAMBER 255-12307-00 Mattson 255-12307-00 ATM robot Z-axis interface PCB board 456-01027-08 O-RING, .239 ID X .064, FLOROSI Rev : D Unit: PAK 475-00508-05 913-10054-00 O-RING, VITON 5099202236 933-14007-00 MOTOR,DC,ROBOT EXT & ROTATE 3006203 CABLE ASSY,SWITCH,TOP PLATE COOL INTLK 57600014 plate gasdistribution-, rotation back 914-11002-00