Parts For Sale LAM VMIVME 5530M LAM VMIVME 5530M Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM VMIVME 5530M Manufacturer LAM Part Number VMIVME 5530M Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other LAM Parts 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 715-011673-006 LAM CAP, LOWER ELECTRODE, 6' 716-021323-002 Quartz Funnel DSQ Chamber 713-011585-004 Cover, Clamp Bolt, Teflon 853-015130-002 MINI-MATCH,,LAM 9600 734-007334-001 O-RING ARM DRIVE ASSY 3 X 3/32', 2.987 ID X .103 723-001205-006 SPACER RND .14 X .25 X .38 721-000964-001 WASHER FLAT 1/4 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 32-0003-006 BELT,TIMING 11.2 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136