Parts For Sale LAM SM03H221 LAM SM03H221 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM SM03H221 Manufacturer LAM Part Number SM03H221 Description [MFC - He] FC-PA780C-BW-TC / He / 300SCC Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other LAM Parts 713-057586-001 PLUG,RTD,THRM CTRL PL 716-011624-007 Ring Ceramic 713-140136-001 BOLT, CAP, ESC 8' 15-391861-09 PIN,MCA,SAPH,3/16DIA,0.8101IN,1 FLAT END 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 PCB 000-061 REV M 775-091420-001 RESIN CARTRIDGE 810-017006-0 PCB Temp Sensor 810-71082-004 Lam Research 810-17082-004 16 Channel Heater Control Boa ... 716-330045-004 Ring edge, ,8' notched, shadow ring, ,ESC 715-011673-106 LAM 715-011673-106-1 Lower Electrode Cap 6 Inch