Parts For Sale LAM RESEARCH 853540066005 LAM RESEARCH 853540066005 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM RESEARCH 853540066005 Manufacturer LAM RESEARCH Part Number 853540066005 Description ENDPOINT DETECTOR Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 – Other LAM RESEARCH Parts 810-073479-009 810-135227-010 853-347146-008 Heater Paddle Assembly 8" 715-810273-002 833-800785-013 2300e4 Exelan Flex DX 810-042882-003