Parts For Sale LAM L147-Q664H LAM L147-Q664H Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM L147-Q664H Manufacturer LAM Part Number L147-Q664H Description CATHODE Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other LAM Parts 605-707109-001 LAM 605-707109-001 / ENGENUITY VME-LTNI-S3 / B105-0102 ... 715-330773-001 COVER TOP LWR CHMBR HOUSING 515-012169-001 TOOL, WAFER CENTERING 723-001205-006 SPACER RND .14 X .25 X .38 720-093814-008 Screw Cap 6-32x0.50 Ceramic 839-101870-002 716-800842-008 NSR,FOC R,SHLD 200MM 839-460152-006 LAM RESEARCH 6" HEATER 839-460152-006 851-110195-120A CHILLER LAM 2080TCU 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136