Parts For Sale LAM L147-Q664H LAM L147-Q664H Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM L147-Q664H Manufacturer LAM Part Number L147-Q664H Description CATHODE Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other LAM Parts 713-057586-001 PLUG,RTD,THRM CTRL PL 853-190023-001 REV A 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 796-028633-010 Screw AL Plate Baffle 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 715-331134-001 715-331134-001 HOUSING HSG,MDL RCTN CHMBR,FXD GP-SHLD 716-006446-001 diffuser cathode For: LAM 716-443234-002 Etch Kit Components in Process Kit ComponentsRING, FOCUS ... 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136 739-007783-001 Seal Quad Q4454
