Parts For Sale LAM L147-Q664H LAM L147-Q664H Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM L147-Q664H Manufacturer LAM Part Number L147-Q664H Description CATHODE Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other LAM Parts 713-057586-001 PLUG,RTD,THRM CTRL PL 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 810-009281-001 PCB MOTOR DRV GAP DRV CNT 839-012255-001 Bellows Gate Inner 715-012233-002 GATE-HARD ANODIZE INNER 716-443086-301 Ring H Edge Si SGL x TALL H Wall 8" 720-009531-010 6-32 x 5/8 Slotted Flat Head, KEL-F 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136 713-011545-002 SPRING SPRING-GUIDE 713-011545-002 A4R1 RAINBOW 4420