Parts For Sale LAM L147-Q664H LAM L147-Q664H Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM L147-Q664H Manufacturer LAM Part Number L147-Q664H Description CATHODE Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other LAM Parts 856-010350-001 KIT, RETO CLAMP PLUNGER EZ WA 853-032776-001 ASSEMBLY PADDLE LIFTER 716-801667-005 Quartz Viewport Window 723-001205-006 SPACER RND .14 X .25 X .38 716-800842-008 NSR,FOC R,SHLD 200MM 715-330746-002 BSR CYLINDER PLUNGER PIN KIT 715-801021-838 LINER. 715-801021-838,POLY LINER 839-011906-912 Electrode Silicon Polish 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 734-000663-001 O-ring inner door bellows 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136
