Parts For Sale LAM L147-Q664H LAM L147-Q664H Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM L147-Q664H Manufacturer LAM Part Number L147-Q664H Description CATHODE Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other LAM Parts 716-008645-005 Cover Ring Quartz HP 713-057586-001 PLUG,RTD,THRM CTRL PL 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 715-028554-002 PLATEUPPERSEAL8 Application: RAINBOW4728 716-016394-013 CONFINEMENT RING 790-008882-205 BELT POSITIVE DRIVE PITCH 0,080 205T 724-077075-002 VACUUM ROBOT PICK 715-013639-007-C Al Ground Ring Part of: Lam Flex 45, M1,M9 131052003 SHIM, MYLAR, 0.010 713-140434-001 Pin Index Ring Quartz 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136