Parts For Sale LAM EE-SPX-301 LAM EE-SPX-301 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM EE-SPX-301 Manufacturer LAM Part Number EE-SPX-301 Description PHOTO MICRO SENSOR (M66) Status Available Approx. Qty 8 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 8.0 JP Other LAM Parts 713-057586-001 PLUG,RTD,THRM CTRL PL 71805-01 Window Quartz 1.25 DIA 853-370186-001 CABLE OVERTEMP 742-000438-001 GASKET, FIBER 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 893-515602-002 NEW Qty.2 Omron E2E-X1R5E1 ASCB Sensor Assembly, Lam Res ... 839-443215-101 Etch Kit Components in Process Kit ComponentsELECTRODE, ... 715-009657-001 RING, EDGE, ANODIZED 724-077075-002 VACUUM ROBOT PICK 718-094523-261 ASSY, ELCTD,ESC 6" MJR FLT LT 715-402323-001