Parts For Sale LAM AH-164-TL5W11E3 LAM AH-164-TL5W11E3 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM AH-164-TL5W11E3 Manufacturer LAM Part Number AH-164-TL5W11E3 Description SWITCH Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 JP Other LAM Parts 713-057586-001 PLUG,RTD,THRM CTRL PL 723-001205-006 SPACER RND .14 X .25 X .38 734-061280-278 O-RING (PACK OF 10) 839-101870-002 716-800842-008 NSR,FOC R,SHLD 200MM 853-012525-001 SPINNER ASSY 44XX 720-009531-010 6-32 x 5/8 Slotted Flat Head, KEL-F 724-077075-002 VACUUM ROBOT PICK 810-71082-004 Lam Research 810-17082-004 16 Channel Heater Control Boa ... 790-006301-001 Lifter Chamber Back-up 716-330122-003 PL TOP CER FXD GAP W/SHLD LAM TCP 9600, MTL ET 715-018991-206 ELECTRODE, ALUMINUM ANODIZE 6"