Parts For Sale LAM AH-164-TL5W11E3 LAM AH-164-TL5W11E3 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM AH-164-TL5W11E3 Manufacturer LAM Part Number AH-164-TL5W11E3 Description SWITCH Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 JP Other LAM Parts 716-008645-005 Cover Ring Quartz HP 713-057586-001 PLUG,RTD,THRM CTRL PL 853-370186-001 CABLE OVERTEMP 723-001205-006 SPACER RND .14 X .25 X .38 714-495015-001 LAM 9600 PART MANIFOLD LINER TRANSITION TO CHAMBER 684-090808-003 CABLE ASSY 839-101870-002 716-800842-008 NSR,FOC R,SHLD 200MM 810-017003-005 DIP/HIGH FREQUENCY PCB MATCH BOX CONTROL 716-031257-531 Ring Edge Top Quartz EBP 300mm 724-077075-002 VACUUM ROBOT PICK 790-006301-001 Lifter Chamber Back-up