Parts For Sale LAM AH-164-TL5W11E3 LAM AH-164-TL5W11E3 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM AH-164-TL5W11E3 Manufacturer LAM Part Number AH-164-TL5W11E3 Description SWITCH Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 JP Other LAM Parts 713-057586-001 PLUG,RTD,THRM CTRL PL 716-021323-002 Quartz Funnel DSQ Chamber 853-370186-001 CABLE OVERTEMP 716-037793-002-B Qtz Base filler Ring Part of: Lam Flex 45, M1,M8 716-006721-001 Ring Insulator Ceramic Large 723-001205-006 SPACER RND .14 X .25 X .38 839-014757-067 Weldment 839-014757-067 Flex Gas Feed Line 1/4" 839-101870-002 716-800842-008 NSR,FOC R,SHLD 200MM 724-077075-002 VACUUM ROBOT PICK 716-011571-001 WASHER CERAMIC WASHER-IN CLAMP 716-011571-001 A4R1 RAINB ... 810-004115-002 PCB, CARD, MEMORY