Parts For Sale LAM AH-164-SLO11E3 LAM AH-164-SLO11E3 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM AH-164-SLO11E3 Manufacturer LAM Part Number AH-164-SLO11E3 Description SWITCH Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 JP Other LAM Parts 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 853-017411-004 853-017411-004 CABLE SSY,HARN,RF BOX GAP CNTRL 716-006711-001 showerhead, graphite oxide For: LAM 853-015130-002 MINI-MATCH,,LAM 9600 723-001205-006 SPACER RND .14 X .25 X .38 716-331142-001 Ring, edge, top, wide 716-443129-001 RING, FOCUS, ESC, INNER, 8 INCH 715-443139-001 734-061280-205 O-RING, 0.421 ID X .139 C/S, VTN 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136