Parts For Sale LAM AH-164-SLO11E3 LAM AH-164-SLO11E3 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM AH-164-SLO11E3 Manufacturer LAM Part Number AH-164-SLO11E3 Description SWITCH Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 JP Other LAM Parts 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 716-801306-008 LINER, 2300 OXIDE DUAL GAS 2.0 853-015130-002 MINI-MATCH,,LAM 9600 716-140141-261 RING, HOT EDGE, 15 DEG J-J 6' 723-001205-006 SPACER RND .14 X .25 X .38 715-007469-102 LOWER ELECTRODE, 2 MIL HARD ANODIZED 734-093789-001 Seal O-Ring Gate Chamber 853-017633-010 SENSOR, OPTICAL ASSY 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 715-011531-015 ELECTRODE ALUM. ANODIZED 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136