Parts For Sale LAM 986154-001 LAM 986154-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 986154-001 Manufacturer LAM Part Number 986154-001 Description FILTER, MOD Status Available Approx. Qty 9 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 9.0 US Other LAM Parts 720-016278-114 1/4-20 x 5/8" Slotted Pan Head Screw 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 720-000920-006 SCR, SCH CAP, 4-40 853-015130-002 MINI-MATCH,,LAM 9600 715-330773-001 COVER TOP LWR CHMBR HOUSING 723-001205-006 SPACER RND .14 X .25 X .38 715-330746-002 BSR CYLINDER PLUNGER PIN KIT 853-001198-001 LAM RESEARCH (LAM) 853-001198-001 GATE&LINKAGE-OUTER DOO ... 724-077075-002 VACUUM ROBOT PICK 853-029173-001 CABLE 131052003 SHIM, MYLAR, 0.010 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136