Parts For Sale LAM 986154-001 LAM 986154-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 986154-001 Manufacturer LAM Part Number 986154-001 Description FILTER, MOD Status Available Approx. Qty 9 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 9.0 US Other LAM Parts 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... FPS1000-24 FPS1000-24 853-015130-002 MINI-MATCH,,LAM 9600 723-001205-006 SPACER RND .14 X .25 X .38 810-007215-001 PCB, POWER, DRIVER, BITS, 0-3 716-443086-401 Etch Kit Components in Process Kit ComponentsRING, HOT E ... 723-007749-001 Spacer Shaft 1/4"OD 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 715-031986-005 810-017086-018 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136