Parts For Sale LAM 986154-001 LAM 986154-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 986154-001 Manufacturer LAM Part Number 986154-001 Description FILTER, MOD Status Available Approx. Qty 9 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 9.0 US Other LAM Parts 746-007652-001 Bearing 15M Cont Angle Row Double 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 853-015130-002 MINI-MATCH,,LAM 9600 716-028454-012 Window Quartz TCP Top LAM 9400 723-001205-006 SPACER RND .14 X .25 X .38 716-011830-006 Etch Kit Components in Process Kit ComponentsFOCUS RING, 6' 839-014757-067 Weldment 839-014757-067 Flex Gas Feed Line 1/4" 853-441696-002-U SPAN Pressure Display Assy 713-140214-001-A GUIDE PIN, REV A 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136