Parts For Sale LAM 986154-001 LAM 986154-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 986154-001 Manufacturer LAM Part Number 986154-001 Description FILTER, MOD Status Available Approx. Qty 9 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 9.0 US Other LAM Parts 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 716-140125-100 853-015130-002 MINI-MATCH,,LAM 9600 716-330167-261 Bottom Actuated Clamp (BAC) Ring. 99.8% High Purity Alum ... 723-001205-006 SPACER RND .14 X .25 X .38 734-000799-001 O-RING 3 1/4 X 1/8 C/S VITON 716-330892-007 GDP - ALLIANCE 9600 PTX 790-008882-205 BELT POSITIVE DRIVE PITCH 0,080 205T 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 713-140434-001 Pin Index Ring Quartz 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136