Parts For Sale LAM 986154-001 LAM 986154-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 986154-001 Manufacturer LAM Part Number 986154-001 Description FILTER, MOD Status Available Approx. Qty 9 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 9.0 US Other LAM Parts 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 853-015130-002 MINI-MATCH,,LAM 9600 716-540198-001 Etch Kit Components in Process Kit ComponentsWINDOW, F S ... 723-001205-006 SPACER RND .14 X .25 X .38 715-045710-807 SMACTRIC DOOR LINER_2300 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 790-006301-001 Lifter Chamber Back-up 768-091910-001 VACUUM PRESSURE SWITCH PV48W SERIES 714-045743-809 Outer Liner 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136 739-900063-001 O-Rings in ALL CATEGORIESQUAD, SEAL .188ID