Parts For Sale LAM 921-002066-003 LAM 921-002066-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 921-002066-003 Manufacturer LAM Part Number 921-002066-003 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown – NL Other LAM Parts 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 853-015130-002 MINI-MATCH,,LAM 9600 715-011900-001 UPPER BAFFLE DOMED ELECTRODE CLEANED 723-001205-006 SPACER RND .14 X .25 X .38 718-092326-081 ELCTD,CAP,8" ESC,NOTCHED 713-330701-001 Cone 810-017003-005 DIP/HIGH FREQUENCY PCB MATCH BOX CONTROL 716-021723-001 GASKET UPPER BELL JAR CLAMP SET OF 2 SET OF 2 PIECES DOU ... 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 715-011622-001 LIFTERWAFER4PIN Application: R4728 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136