Parts For Sale LAM 856-010386-001 LAM 856-010386-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 856-010386-001 Manufacturer LAM Part Number 856-010386-001 Description KIT,BACKSIDE COOL Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 853-015130-002 MINI-MATCH,,LAM 9600 723-001205-006 SPACER RND .14 X .25 X .38 734-093789-001 Seal O-Ring Gate Chamber 715-360197-001 GASKET, 1/2VCR DRILLED .013 CENTER HOLE 716-031453-001 RING, FILLER, LOWER CHAMBER 716-140432-002 Insert Ring Upper Keyed 22-132450-00 O-RING 724-077075-002 VACUUM ROBOT PICK 716-069688-022 Electrode Inner 131052003 SHIM, MYLAR, 0.010 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136