Parts For Sale LAM 855-001164-004 LAM 855-001164-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 855-001164-004 Manufacturer LAM Part Number 855-001164-004 Description PROG ROM SET 490/590 Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 839-031766-001 BELLOWS LIFTER 713-028487-001 Vespel Confinement Ring 4 week lead 716-006721-001 Ring Insulator Ceramic Large 723-001205-006 SPACER RND .14 X .25 X .38 720-000930-034 LAM 720-000930-034 SCR SCH CAP 6-32 X2-1/8 LG SST (lot ... 839-101870-002 PCB 000-061 REV M 730-037464-04 PSY730 RBN CBL, CTI TO INTCNCT PNL INTERIOR 720-443208-010 6-32 x 5/8" Slotted Flat Head Screw 131052003 SHIM, MYLAR, 0.010 716-012639-024 NOZZLE, INJ. 8X, .055-45DEG RDL-1CTR 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136