Parts For Sale LAM 855-001164-004 LAM 855-001164-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 855-001164-004 Manufacturer LAM Part Number 855-001164-004 Description PROG ROM SET 490/590 Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 678-007941-001 HEATER CARTRIDGE 120VAC 75W 716-030135-001 Focus ring, 8" ESC 713-057586-001 PLUG,RTD,THRM CTRL PL 715-012246-002 Sft brg mnt inr gt 723-001205-006 SPACER RND .14 X .25 X .38 715-330984-001 GASINJECTIONRING(R) Application: ALLIANCE9400PTX 839-101870-002 734-093789-001 Seal O-Ring Gate Chamber 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 768-091910-001 VACUUM PRESSURE SWITCH PV48W SERIES 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136