Parts For Sale LAM 855-001164-004 LAM 855-001164-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 855-001164-004 Manufacturer LAM Part Number 855-001164-004 Description PROG ROM SET 490/590 Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 716-140118-001 RING,FOC ESC 8" DOUBLE PACKAGE 715-011492-008 715-11492-8 715-011492-008 ALLIANCE 8" DSQ ARM LAM RESEA ... 716-011009-001 Window Quartz (The Left Side) 716-028688-261 Plate Bottom Wafer Clamp 6" 734-004194-001 O-RING 1/2' ID X 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 716-800842-008 NSR,FOC R,SHLD 200MM 839-440462-308 ASSY,ELCTD,ESC,200mm,SEMI 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136