Parts For Sale LAM 855-001164-004 LAM 855-001164-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 855-001164-004 Manufacturer LAM Part Number 855-001164-004 Description PROG ROM SET 490/590 Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 715-018991-208 ELECTRODE, ALUMINUM ANODIZE 713-057586-001 PLUG,RTD,THRM CTRL PL 718-094756-061 ELCTD,UPR,6" ESC,MJR FLAT 715-012246-002 Sft brg mnt inr gt 723-001205-006 SPACER RND .14 X .25 X .38 734-007460-001 O-RING VITON BK 177,47X2,62; 6.987 ID X 0.103 C/S 839-101870-002 715-011531-002 ELECTRODE ALUM. ANODIZED 715-009306-006 Ring Focus Aluminum 6" 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136