Parts For Sale LAM 855-001164-004 LAM 855-001164-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 855-001164-004 Manufacturer LAM Part Number 855-001164-004 Description PROG ROM SET 490/590 Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 713-057586-001 PLUG,RTD,THRM CTRL PL 716-011009-001 Window Quartz (The Left Side) 716-011553-001 WINDOW, QUARTZ 853-011076-001 ASSY GROUND STRAP SET OF 7 SET OF 7 PIECES 713-140136-001 BOLT, CAP, ESC 8' 723-001205-006 SPACER RND .14 X .25 X .38 715-11492-006 ASSY WFR HLDR TIGHT POCKET 6 XLL 839-101870-002 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 716-011533-001 Window Quartz Gap Insulator 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136