Parts For Sale LAM 855-001164-004 LAM 855-001164-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 855-001164-004 Manufacturer LAM Part Number 855-001164-004 Description PROG ROM SET 490/590 Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 713-057586-001 PLUG,RTD,THRM CTRL PL 42-0007-007 MOTOR, STPR,5.5V 1.25A OPM: ORIENTAL MOTOR P/N OPM: PH29602B 723-001205-006 SPACER RND .14 X .25 X .38 718-092326-081 ELCTD,CAP,8" ESC,NOTCHED 839-101870-002 718-043893-801 ELECTRODE, ESC 9400 851-110195-120A CHILLER LAM 2080TCU 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 810-017018-001 GAP MOTOR CONTROLLER INSTALLATION POSSIBLE ON: RAINBOW 4520 716-031453-002 RING FILLER LOWER CHAMBER 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136