Parts For Sale LAM 855-001164-004 LAM 855-001164-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 855-001164-004 Manufacturer LAM Part Number 855-001164-004 Description PROG ROM SET 490/590 Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 856-010350-001 KIT, RETO CLAMP PLUNGER EZ WA 853-002900-001 ASSY RF CABLE 715-011640-006 Etch Kit Components in Process Kit ComponentsRING FOCUS ... 853-011661-001 LAM RESEARCH 853-011661-001 CYLINDER LIFTER DELIVERED WT ... 723-001205-006 SPACER RND .14 X .25 X .38 839-330743-002 LAM BSR Bellows 716-800842-008 NSR,FOC R,SHLD 200MM 715-011565-002 Screw Vent #10-32 Pasivated SS 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 739-900064-002 QUAD SEAL .070 ID PERIMETER 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136