Parts For Sale LAM 855-001164-004 LAM 855-001164-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 855-001164-004 Manufacturer LAM Part Number 855-001164-004 Description PROG ROM SET 490/590 Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 856-010350-001 KIT, RETO CLAMP PLUNGER EZ WA 716-011624-007 Ring Ceramic 839-800327-432 LAM 839-800327-432 ESC Chuck 723-001205-006 SPACER RND .14 X .25 X .38 716-041983-001 Chamber Liner Ceramic 9600 716-028668-261 LOWER WAFER CLAMP 716-800842-008 NSR,FOC R,SHLD 200MM 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 839-011520-001 WELDMENT,GAS,FEEDLINE,FLEX 716-330045-004 Ring edge, ,8' notched, shadow ring, ,ESC 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136
