Parts For Sale LAM 854-003120-002 LAM 854-003120-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 854-003120-002 Manufacturer LAM Part Number 854-003120-002 Description ASSY DRIVE SHAFT ,OUTER DOOR Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 839-031766-001 BELLOWS LIFTER 853-015130-002 MINI-MATCH,,LAM 9600 715-330825-007 ALUMINUM CHAMBER LINER 723-001205-006 SPACER RND .14 X .25 X .38 839-460152-006 LAM RESEARCH 6" HEATER 839-460152-006 734-090690-001 O-RING VITON 405.26X5.33 839-011906-912 Electrode Silicon Polish 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 720-000950-032 Screw 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136