Parts For Sale LAM 854-003120-002 LAM 854-003120-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 854-003120-002 Manufacturer LAM Part Number 854-003120-002 Description ASSY DRIVE SHAFT ,OUTER DOOR Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 734-007359-001 O-RING, 14.0 ID X 1/8 C/S VITON 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 853-015130-002 MINI-MATCH,,LAM 9600 723-001205-006 SPACER RND .14 X .25 X .38 734-007460-001 O-RING VITON BK 177,47X2,62; 6.987 ID X 0.103 C/S 734-093789-001 Seal O-Ring Gate Chamber 853-495527-002 ASSY CA COAX RF GEN 4520X 716-331157-022 Disk Interferometer Top Gas 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 853-011168-002 GAP DRIVER MOTORPROTECTOR AN BREAKOUT 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136