Parts For Sale LAM 853-810590-001 LAM 853-810590-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-810590-001 Manufacturer LAM Part Number 853-810590-001 Description ASSY,UPS MDL Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 716-021323-001 Funnel Quartz Power Supply Module 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 713-021725-001 PAD, INSERT WAFER HOLDER, 5641-0162-SC513 CHEMRAZ 713-02 ... 718-098592-001 LOCKING RING DPS METAL CHAMBER 716-800842-008 NSR,FOC R,SHLD 200MM 840-009865-040 VACUUM, VALVE, REPAIR KIT (HPS) Double Baged 677-001150-001 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 716-011603-001 PLATE, SEAL 32-0002-001 PULLEY 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136