Parts For Sale LAM 853-810590-001 LAM 853-810590-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-810590-001 Manufacturer LAM Part Number 853-810590-001 Description ASSY,UPS MDL Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 716-028454-512 Disk Quartz 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 839-011906-001 ELECTRODE, SILICON, 6" 853-015130-002 MINI-MATCH,,LAM 9600 723-001205-006 SPACER RND .14 X .25 X .38 716-331142-001 Ring, edge, top, wide 713-028553-001 200mm Confinement Ring 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 716-803156-004 B Focus Ring CVR DFC 300mm 716-031257-209 Ring Edge Top 2300 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136