Parts For Sale LAM 853-6313-1 LAM 853-6313-1 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-6313-1 Manufacturer LAM Part Number 853-6313-1 Description VALVE, KURODA, ACTUATOR Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other LAM Parts 713-057586-001 PLUG,RTD,THRM CTRL PL 715-330299-001 853-015130-002 MINI-MATCH,,LAM 9600 716-011573-001 Ceramic Plunger 1/4 Turn OEM# 716-011573-001 CPN: ML-43224 716-441044-005 Shower Head Sapphire Coated Strip Chamber 723-001205-006 SPACER RND .14 X .25 X .38 853-017643-003-D CMLA-21 853-017643-003-D 716-443129-001 RING, FOCUS, ESC, INNER, 8 INCH 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 716-160255-002 Chamber Plasma Quartz 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136