Parts For Sale LAM 853-6313-1 LAM 853-6313-1 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-6313-1 Manufacturer LAM Part Number 853-6313-1 Description VALVE, KURODA, ACTUATOR Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other LAM Parts 853-012530-001 ASSY, VAC, BLK, FRU 716-040737-402 Ceramic Coupling Ring 715-012244-001 Shield Bellows Inner Gate, Lot of 2 713-057586-001 PLUG,RTD,THRM CTRL PL 716-021323-002 Quartz Funnel DSQ Chamber 853-015130-002 MINI-MATCH,,LAM 9600 716-331088-001 Quartz Top Edge Ring, 8" ESC 723-001205-006 SPACER RND .14 X .25 X .38 766-009447-001 LAM 766-009447-001 VALVE,SOLENOID,4 WAY 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136