Parts For Sale LAM 853-6313-1 LAM 853-6313-1 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-6313-1 Manufacturer LAM Part Number 853-6313-1 Description VALVE, KURODA, ACTUATOR Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other LAM Parts 715-018991-208 ELECTRODE, ALUMINUM ANODIZE 713-057586-001 PLUG,RTD,THRM CTRL PL 853-025054-001 ASSY,HSG ESC POWER SUPPLY 716-252543-008 SI HOT EDGE RING 853-015130-002 MINI-MATCH,,LAM 9600 715-006310-001 SPACER 4-PIN LIFTER 716-140432-061 QUARTZ RETAINING RING 723-001205-006 SPACER RND .14 X .25 X .38 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 718-443144-006 Screw Peek 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136