Parts For Sale LAM 853-6313-1 LAM 853-6313-1 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-6313-1 Manufacturer LAM Part Number 853-6313-1 Description VALVE, KURODA, ACTUATOR Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other LAM Parts 716-330121-001 LAM, 716-330121-001, Window Shaped Ceramic FXD GAPNWindo ... 713-057586-001 PLUG,RTD,THRM CTRL PL 853-015130-002 MINI-MATCH,,LAM 9600 723-001205-006 SPACER RND .14 X .25 X .38 765-007787-001 SPROCKET DRIVE 2.873PD.500B 796-006759-001 GASKET NICKEL W/RETAINER 1/4" 734-090690-001 O-RING VITON 405.26X5.33 724-077075-002 VACUUM ROBOT PICK 734-091993-001 O-Ring Flouro Silicon Window Quartz 131052003 SHIM, MYLAR, 0.010 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136 853-17633-009 Opto sensor