Parts For Sale LAM 853-6313-1 LAM 853-6313-1 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-6313-1 Manufacturer LAM Part Number 853-6313-1 Description VALVE, KURODA, ACTUATOR Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other LAM Parts 716-049806-001 RING RINGDFG MOD 1-ROW 853-031764-001 CYLINDER ASSY 721-000956-002 WASHER, SPLIT, SM PATTEN 853-015130-002 MINI-MATCH,,LAM 9600 723-001205-006 SPACER RND .14 X .25 X .38 839-012255-001 Bellows Gate Inner 30-0008-008 O-RING 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 716-160255-002 Chamber Plasma Quartz 810-71082-004 Lam Research 810-17082-004 16 Channel Heater Control Boa ... 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136