Parts For Sale LAM 853-5903-001 LAM 853-5903-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-5903-001 Manufacturer LAM Part Number 853-5903-001 Description ASSY SOFT PUMP DOWN Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other LAM Parts 716-028249-064 RING,FOCUS,CER,LWR,MJR,FLAT,9600SE 853-015130-002 MINI-MATCH,,LAM 9600 605-012620-001 PCB,INDEX,DUAL SNSR,ASYSI 716-140163-261 Ring Hot Edge 15 DEG ESC STD 6" 723-001205-006 SPACER RND .14 X .25 X .38 718-043893-801 ELECTRODE, ESC 9400 839-460152-006 LAM RESEARCH 6" HEATER 839-460152-006 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 716-006446-001 diffuser cathode For: LAM 810-71082-004 Lam Research 810-17082-004 16 Channel Heater Control Boa ... 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136