Parts For Sale LAM 853-5902-001 LAM 853-5902-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-5902-001 Manufacturer LAM Part Number 853-5902-001 Description ASSY CIRCUIT SOFT PUMP DOWN Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other LAM Parts 810-017025-003 PCB, BREAKOUT, RF, GEN, CART 714-801511-002-G Liner, Mtg, PL ESC, Part of: Lam Versys 2300, PM3 853-015130-002 MINI-MATCH,,LAM 9600 723-001205-006 SPACER RND .14 X .25 X .38 PCB 000-061 REV M 716-140139-001 LAM RESEARCH 716-140139-001 RING HOT EDGE HI WALL ESC 8" ... 715-360197-001 GASKET, 1/2VCR DRILLED .013 CENTER HOLE 716-331099-001 R, EDGE, 6", FL, TOP, QTZ 730-037464-04 PSY730 RBN CBL, CTI TO INTCNCT PNL INTERIOR 131052003 SHIM, MYLAR, 0.010 742-093181-002 GSKT RF BECU ISSUE IN FT. 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136