Parts For Sale LAM 853-5902-001 LAM 853-5902-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-5902-001 Manufacturer LAM Part Number 853-5902-001 Description ASSY CIRCUIT SOFT PUMP DOWN Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other LAM Parts 713-057586-001 PLUG,RTD,THRM CTRL PL 839-031766-001 BELLOWS LIFTER 853-015130-002 MINI-MATCH,,LAM 9600 723-001205-006 SPACER RND .14 X .25 X .38 715-370861-026 Orfice Cylinder 55 Holes Dia. 0.052" 853-037747-008 HARN,SIG,TC,DISTRN,2300,HTD,WDO 724-077075-002 VACUUM ROBOT PICK 734-091993-001 O-Ring Flouro Silicon Window Quartz 131052003 SHIM, MYLAR, 0.010 796-060306-002 Gasket 739-900064-002 QUAD SEAL .070 ID PERIMETER 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136
