Parts For Sale LAM 853-5902-001 LAM 853-5902-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-5902-001 Manufacturer LAM Part Number 853-5902-001 Description ASSY CIRCUIT SOFT PUMP DOWN Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other LAM Parts 713-021725-001 PAD, INSERT WAFER HOLDER, 5641-0162-SC513 CHEMRAZ 713-02 ... 734-007524-205 O-RING 720-093815-006 Screw 6-32x0.38 Ceramic 853-031764-004 7890 LAM RESEARCH LOWER ELECTRODE, ESC, FIXED GAP (PARTS ... 723-001205-006 SPACER RND .14 X .25 X .38 716-800842-008 NSR,FOC R,SHLD 200MM 715-443131-001 RING, GROUNDING ALUM 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 734-007461-001 O-RING VITON 5 1/4IDX3/32 716-140139-211 Ring hot edge, hiwall, ESC8" 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136
