Parts For Sale LAM 853-5902-001 LAM 853-5902-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-5902-001 Manufacturer LAM Part Number 853-5902-001 Description ASSY CIRCUIT SOFT PUMP DOWN Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other LAM Parts 853-015130-002 MINI-MATCH,,LAM 9600 723-001205-006 SPACER RND .14 X .25 X .38 839-330743-002 LAM BSR Bellows 810-017093-002 Lam Research 810-017093-002 Gap Motor Control PCB Refurb ... 715-360197-001 GASKET, 1/2VCR DRILLED .013 CENTER HOLE 715-330746-002 BSR CYLINDER PLUNGER PIN KIT 716-331157-014 Top disk quartz 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 716-011603-001 PLATE, SEAL 810-71082-004 Lam Research 810-17082-004 16 Channel Heater Control Boa ... 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136