Parts For Sale LAM 853-542072-001 LAM 853-542072-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-542072-001 Manufacturer LAM Part Number 853-542072-001 Description ASSY LIFT ROBOT ALLI 6 Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 US Other LAM Parts 716-140139-213 RING, HOT EDGE, HI WALL, ESC 8" 713-057586-001 PLUG,RTD,THRM CTRL PL 853-370186-001 CABLE OVERTEMP 716-140432-061 QUARTZ RETAINING RING 713-037072-003 KIT,PEEK HARDWARE LAM2300 FLEX COPPER, SPARES 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 716-331142-001 Ring, edge, top, wide 720-000960-010 Modifed screw, 1/4-20 x 5/8 SHC 724-077075-002 VACUUM ROBOT PICK 716-443234-002 Etch Kit Components in Process Kit ComponentsRING, FOCUS ... 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136