Parts For Sale LAM 853-5080-001 LAM 853-5080-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-5080-001 Manufacturer LAM Part Number 853-5080-001 Description CONTROLLER Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other LAM Parts 716-030135-001 Focus ring, 8" ESC 770-003304-001 AIR CYL, COMPACT, ASFH3X12-HTVUC3 713-140136-001 BOLT, CAP, ESC 8' 716-330355-001 WINDOW, QUARTZ, HTD-EP 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 716-800842-008 NSR,FOC R,SHLD 200MM 724-077075-002 VACUUM ROBOT PICK 716-011427-001 DSQ Quartz Window 676-001677-001 MOTOR 24VDC 810-71082-004 Lam Research 810-17082-004 16 Channel Heater Control Boa ... 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136