Parts For Sale LAM 853-491173-001 LAM 853-491173-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-491173-001 Manufacturer LAM Part Number 853-491173-001 Description QUARTZ PAN THIN FOR RO 853-491173-001 Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 NL Other LAM Parts 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 716-140118-001 RING,FOC ESC 8" DOUBLE PACKAGE 715-011147-006 Key 1/8 Sq X 3' Brake 853-015130-002 MINI-MATCH,,LAM 9600 723-001205-006 SPACER RND .14 X .25 X .38 716-011536-001 RING UPPER INSULATOR ELECTROD DOUBLE PACKAGE 715-330745-003 WEB BELLOWS HOUSING 790-250171-001 BELLOWS LIFT PINS 9500 724-077075-002 VACUUM ROBOT PICK 734-091993-001 O-Ring Flouro Silicon Window Quartz 131052003 SHIM, MYLAR, 0.010 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136