Parts For Sale LAM 853-4197-001 LAM 853-4197-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-4197-001 Manufacturer LAM Part Number 853-4197-001 Description ASSY VALVE DELAY Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other LAM Parts 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 716-330504-064 ESC Focus Ring (Modified--Regrind) 6" 853-015130-002 MINI-MATCH,,LAM 9600 734-092107-001 O-RING GATE SEAL 200 MM 718-098592-001 LOCKING RING DPS METAL CHAMBER 723-001205-006 SPACER RND .14 X .25 X .38 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 853-017631-002 ASSY, VAC SW WASCO 853-017631-002 716-011533-001 Window Quartz Gap Insulator 715-021483-001 PLATE FEEDTHRU, GAS RING 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136
