Parts For Sale LAM 853-370542-001 LAM 853-370542-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-370542-001 Manufacturer LAM Part Number 853-370542-001 Description ASSY, HARN, RF CA INTLK JMPR Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 715-018991-208 ELECTRODE, ALUMINUM ANODIZE 713-057586-001 PLUG,RTD,THRM CTRL PL 716-331128-001 Window Sapphire 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 718-043893-801 ELECTRODE, ESC 9400 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 716-160255-002 Chamber Plasma Quartz 32-0002-001 PULLEY 715-130079-008 HOLDER,WAFER,8″,ISO,BOT CLP RDC PK 715-130079-008 REV. 2 ... 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136