Parts For Sale LAM 853-320030-003 LAM 853-320030-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-320030-003 Manufacturer LAM Part Number 853-320030-003 Description ASSY OPT SNSR DARL W/LEADS Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 – Other LAM Parts 734-007359-001 O-RING, 14.0 ID X 1/8 C/S VITON 854-023591-001 854-023591-001 BEARING ASSY SPHERICAL BEARING 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 853-015130-002 MINI-MATCH,,LAM 9600 723-001205-006 SPACER RND .14 X .25 X .38 853-025245-001 724-077075-002 VACUUM ROBOT PICK 839-011906-912 Electrode Silicon Polish 734-091993-001 O-Ring Flouro Silicon Window Quartz 131052003 SHIM, MYLAR, 0.010 2010366-00 SEZ-Pwr Supply 400W 5/+-12/24V Alpha 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136