Parts For Sale LAM 853-320030-002 LAM 853-320030-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-320030-002 Manufacturer LAM Part Number 853-320030-002 Description ASSY OPT SNSR DARL W/LEADS Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 3.0 US Other LAM Parts 716-140139-213 RING, HOT EDGE, HI WALL, ESC 8" 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 713-021725-001 PAD, INSERT WAFER HOLDER, 5641-0162-SC513 CHEMRAZ 713-02 ... 856-010350-001 KIT, RETO CLAMP PLUNGER EZ WA 715-025724-001 Ring, gas feed, flanged 721-000946-001 WASHER, FLAT, #8 (PACK OF 10) 716-800842-008 NSR,FOC R,SHLD 200MM 839-460152-006 LAM RESEARCH 6" HEATER 839-460152-006 839-440462-308 ASSY,ELCTD,ESC,200mm,SEMI 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 713-010222-001 GUAGE, BASE GAP