Parts For Sale LAM 853-320030-002 LAM 853-320030-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-320030-002 Manufacturer LAM Part Number 853-320030-002 Description ASSY OPT SNSR DARL W/LEADS Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 3.0 US Other LAM Parts 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 810-099175-011 PCB,VIOP PHASE III BOARD 853-015130-002 MINI-MATCH,,LAM 9600 716-331088-001 Quartz Top Edge Ring, 8" ESC 720-090943-010 Bolt Confinement Ring Kel F LAM 4520 716-540198-001 Etch Kit Components in Process Kit ComponentsWINDOW, F S ... 723-001205-006 SPACER RND .14 X .25 X .38 715-331211-002 CHAMBERLINER(P) Application: TCP 724-077075-002 VACUUM ROBOT PICK 716-012795-002 ADAPTER, FOCR., QTZ DOUBLE PACKAGE 131052003 SHIM, MYLAR, 0.010 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136