Parts For Sale LAM 853-320030-002 LAM 853-320030-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-320030-002 Manufacturer LAM Part Number 853-320030-002 Description ASSY OPT SNSR DARL W/LEADS Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 3.0 US Other LAM Parts 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 715-011925-001 BOLT, CAPPED, CLAMPED RETAINING 60-00134-00 Assy. Clamp Retainer & Plunger 853-015130-002 MINI-MATCH,,LAM 9600 723-001205-006 SPACER RND .14 X .25 X .38 839-014757-067 Weldment 839-014757-067 Flex Gas Feed Line 1/4" 734-093789-001 Seal O-Ring Gate Chamber 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 853-032945-001 HARN HEATER ISOVALVE LAM Part. No. 853-032945-001 715-130079-008 HOLDER,WAFER,8″,ISO,BOT CLP RDC PK 715-130079-008 REV. 2 ... 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136