Parts For Sale LAM 853-320030-002 LAM 853-320030-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-320030-002 Manufacturer LAM Part Number 853-320030-002 Description ASSY OPT SNSR DARL W/LEADS Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 3.0 US Other LAM Parts 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 713-021725-001 PAD, INSERT WAFER HOLDER, 5641-0162-SC513 CHEMRAZ 713-02 ... 856-010350-001 KIT, RETO CLAMP PLUNGER EZ WA 716-006721-001 Ring Insulator Ceramic Large 810-017034-300 Lam 4420 Force Computers Inc. SYS68K CPU-6A Board 810-01 ... 716-028721-262 PLATE, BOT CLAMP, DOME, SHADOW 716-800842-008 NSR,FOC R,SHLD 200MM 715-360197-001 GASKET, 1/2VCR DRILLED .013 CENTER HOLE 13-1000-030 MOUNT, CYLINDER 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 716-031453-002 RING FILLER LOWER CHAMBER