Parts For Sale LAM 853-190313-002 LAM 853-190313-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-190313-002 Manufacturer LAM Part Number 853-190313-002 Description ASSY, HARN, HI-VOLT, ESC, OXD Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 515-010273-001 TOOL, LWR, CHAMBER, COVER 853-015130-002 MINI-MATCH,,LAM 9600 713-021875-001 Clamp Director Gas ISO Lower 723-001205-006 SPACER RND .14 X .25 X .38 796-901038-002 DOOR,VAT,ENHANCED,LOADLOCK,230 716-331157-014 Top disk quartz 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 716-011563-261 PLATE, WAFER CLAMP 734-007461-001 O-RING VITON 5 1/4IDX3/32 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136