Parts For Sale LAM 853-190313-002 LAM 853-190313-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-190313-002 Manufacturer LAM Part Number 853-190313-002 Description ASSY, HARN, HI-VOLT, ESC, OXD Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 716-030135-001 Focus ring, 8" ESC 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 713-021725-001 PAD, INSERT WAFER HOLDER, 5641-0162-SC513 CHEMRAZ 713-02 ... 810-005672-001 PCB, TTL Power Driver 839-440462-518 Assy ESC Dual zone JEIDA 8, HPT ESC 716-330045-281 R, edge, non landed, 8' not, 96DTX 716-800842-008 NSR,FOC R,SHLD 200MM 715-330825-006 CHAMBERLINER Application: ALLIANCE9400PTX 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 716-330045-004 Ring edge, ,8' notched, shadow ring, ,ESC 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136