Parts For Sale LAM 853-190313-002 LAM 853-190313-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-190313-002 Manufacturer LAM Part Number 853-190313-002 Description ASSY, HARN, HI-VOLT, ESC, OXD Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 839-080830-001 Assembly Screw Jack 734-006304-001 O-RING 1/4X1/16' 853-015130-002 MINI-MATCH,,LAM 9600 723-001205-006 SPACER RND .14 X .25 X .38 857-020295-104 NEW LAM RESEARCH 857-020295-104 EZ WAFER PLUNGER CLAMP 734-093789-001 Seal O-Ring Gate Chamber 750-007782-001 CHAIN GAP DRIVE (HARLEY); ROLLER CHAIN 15.75' LONG #35 724-077075-002 VACUUM ROBOT PICK 720-443208-010 6-32 x 5/8" Slotted Flat Head Screw 131052003 SHIM, MYLAR, 0.010 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136