Parts For Sale LAM 853-190313-002 LAM 853-190313-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-190313-002 Manufacturer LAM Part Number 853-190313-002 Description ASSY, HARN, HI-VOLT, ESC, OXD Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 716-008645-001 Etch Kit Components in Process Kit ComponentsCOVER, RING ... 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 713-021725-001 PAD, INSERT WAFER HOLDER, 5641-0162-SC513 CHEMRAZ 713-02 ... 720-092758-010 Screw 734-007358-001 O-RING, 13.00 ID X 1/8 C/S 853-012123-001 ELL HARMONIC DRIVE ASSEMBLY, PLASTIC CONNECTOR - LAM RAINBOW 716-800842-008 NSR,FOC R,SHLD 200MM 839-443215-502 ELECTRODE SILICON ASSY L RES SM HO REV C 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136 715-011746-161 Plate wafer clamp 6' .025 dome reduced HGT