Parts For Sale LAM 853-190313-002 LAM 853-190313-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-190313-002 Manufacturer LAM Part Number 853-190313-002 Description ASSY, HARN, HI-VOLT, ESC, OXD Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 853-015130-002 MINI-MATCH,,LAM 9600 715-330825-007 ALUMINUM CHAMBER LINER 723-001205-006 SPACER RND .14 X .25 X .38 714-801511-002-B Al Liner Part of: Lam, M1 Kit PCB 000-061 REV M 716-016394-001 Etch Kit Components in Process Kit ComponentsRING, HP CO ... 716-140139-001 LAM RESEARCH 716-140139-001 RING HOT EDGE HI WALL ESC 8" ... 730-037464-04 PSY730 RBN CBL, CTI TO INTCNCT PNL INTERIOR 131052003 SHIM, MYLAR, 0.010 742-093181-002 GSKT RF BECU ISSUE IN FT. 715-030860-003 Flex45 Chamber Liner 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136