Parts For Sale LAM 853-170246-004 LAM 853-170246-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-170246-004 Manufacturer LAM Part Number 853-170246-004 Description Assy plasma ARSR WFR area Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 4.0 – Other LAM Parts 715-030860-001 LINER/SPACER, EXT GND RING, 2.0OCM 713-540183-002 RING, LOWER PEEK (PACK OF 10) 715-006439-001 Electrode, Airlock, LAM P/N 715-006439-001 713-057586-001 PLUG,RTD,THRM CTRL PL 853-370186-001 CABLE OVERTEMP 715-006310-001 SPACER 4-PIN LIFTER 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 716-800842-008 NSR,FOC R,SHLD 200MM 713-540184-004 .060 UPPER PEAK RING MODI 715-330745-003 WEB BELLOWS HOUSING 724-077075-002 VACUUM ROBOT PICK