Parts For Sale LAM 853-170246-004 LAM 853-170246-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-170246-004 Manufacturer LAM Part Number 853-170246-004 Description Assy plasma ARSR WFR area Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 4.0 – Other LAM Parts 716-021323-001 Funnel Quartz Power Supply Module 713-057586-001 PLUG,RTD,THRM CTRL PL 715-330135-001 BSR GAS INJECTION RING INSTALLATION POSSIBLE ON: LAM TCP ... 853-370186-001 CABLE OVERTEMP 715-330451-113 215 LAM RESEARCH HEATER COIL 715-330451-113 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 716-800842-008 NSR,FOC R,SHLD 200MM 715-028627-001 PLATE LOWER BAFFLE 6' 724-077075-002 VACUUM ROBOT PICK 839-019090-620 716-140139-211 Ring hot edge, hiwall, ESC8"
