Parts For Sale LAM 853-170245-002 LAM 853-170245-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-170245-002 Manufacturer LAM Part Number 853-170245-002 Description ASSY, PLASMA, ARSR, He BACKSIDE Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 713-057586-001 PLUG,RTD,THRM CTRL PL 716-028454-715 Disk Quartz HPQ 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 715-443178-001 RING, EDGE, HOT 810-017004-001 Lam Research 4420 Solenoid Interlock Board 810-017004-00 ... 715-360197-001 GASKET, 1/2VCR DRILLED .013 CENTER HOLE 750-007782-001 CHAIN GAP DRIVE (HARLEY); ROLLER CHAIN 15.75' LONG #35 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 2010366-00 SEZ-Pwr Supply 400W 5/+-12/24V Alpha 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136