Parts For Sale LAM 853-170245-002 LAM 853-170245-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-170245-002 Manufacturer LAM Part Number 853-170245-002 Description ASSY, PLASMA, ARSR, He BACKSIDE Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 716-021323-001 Funnel Quartz Power Supply Module 713-057586-001 PLUG,RTD,THRM CTRL PL 739-090783-001 STRAP CONTACT RF COPPER 734-092107-001 O-RING GATE SEAL 200 MM 716-028454-012 Window Quartz TCP Top LAM 9400 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 840-009865-040 VACUUM, VALVE, REPAIR KIT (HPS) Double Baged 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 853-900986-010 ASSY,010 PC 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136