Parts For Sale LAM 853-170245-002 LAM 853-170245-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-170245-002 Manufacturer LAM Part Number 853-170245-002 Description ASSY, PLASMA, ARSR, He BACKSIDE Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 713-057586-001 PLUG,RTD,THRM CTRL PL 716-028547-001 PLATE, WAFER CLAMP 716-028454-012 Window Quartz TCP Top LAM 9400 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 839-024354-100 VALVE,VENT,XLL 724-077075-002 VACUUM ROBOT PICK 718-094523-261 ASSY, ELCTD,ESC 6" MJR FLT LT 131052003 SHIM, MYLAR, 0.010 666-090837-001 TEMP SENSOR, M&W TCU 716-330045-004 Ring edge, ,8' notched, shadow ring, ,ESC 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136