Parts For Sale LAM 853-170245-002 LAM 853-170245-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-170245-002 Manufacturer LAM Part Number 853-170245-002 Description ASSY, PLASMA, ARSR, He BACKSIDE Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 713-520546-002 O-Rings in ALL CATEGORIESSEAL, QUAD RING SPC 715-495014-001 LINER CHAMBER TRNSN 853-031764-004 7890 LAM RESEARCH LOWER ELECTRODE, ESC, FIXED GAP (PARTS ... 723-001205-006 SPACER RND .14 X .25 X .38 839-014757-067 Weldment 839-014757-067 Flex Gas Feed Line 1/4" 839-101870-002 PCB 000-061 REV M 734-092559-013 O-RING .070 DIA C/S FSI 716-021884-001 GASKET DUCT AIR COOLED ISO 730-037464-04 PSY730 RBN CBL, CTI TO INTCNCT PNL INTERIOR 131052003 SHIM, MYLAR, 0.010 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136
