Parts For Sale LAM 853-170245-001 LAM 853-170245-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-170245-001 Manufacturer LAM Part Number 853-170245-001 Description ASSY PLASMA ARSR HE BCKSDE Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 3.0 US Other LAM Parts 713-057586-001 PLUG,RTD,THRM CTRL PL 716-021323-002 Quartz Funnel DSQ Chamber 853-012095-005 5"ASSY 5" EXIT ARM 853-370186-001 CABLE OVERTEMP 772-470656-001 RGLTR,3-PORT & GAUGE,10Ra 739-090783-001 STRAP CONTACT RF COPPER 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 716-800842-008 NSR,FOC R,SHLD 200MM 796-009861-016 Valve check 16psi 720-009531-010 6-32 x 5/8 Slotted Flat Head, KEL-F 724-077075-002 VACUUM ROBOT PICK