Parts For Sale LAM 853-170245-001 LAM 853-170245-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-170245-001 Manufacturer LAM Part Number 853-170245-001 Description ASSY PLASMA ARSR HE BCKSDE Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 3.0 US Other LAM Parts 716-026652-902 Ring Edge BOT 200-300mm 713-057586-001 PLUG,RTD,THRM CTRL PL 853-370186-001 CABLE OVERTEMP 715-012171-002 ARM SHAFT ASSY 716-021856-001 CHEMRAZ, GASKET 723-001205-006 SPACER RND .14 X .25 X .38 734-007460-001 O-RING VITON BK 177,47X2,62; 6.987 ID X 0.103 C/S 715-011531-016 ELECTRODE, ALUMINUM, ANODIZED 839-101870-002 716-800842-008 NSR,FOC R,SHLD 200MM 724-077075-002 VACUUM ROBOT PICK 768-093959-200 SWITCH, PRESSURE, VACUUM,125 TORR,PSH3,200