Parts For Sale LAM 853-170201-100 LAM 853-170201-100 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-170201-100 Manufacturer LAM Part Number 853-170201-100 Description WELDMENT, ASSY ADV HE COOLING Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 734-007359-001 O-RING, 14.0 ID X 1/8 C/S VITON 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 716-026652-002 RING.EDGE.BOT.200-300mm 60-00134-00 Assy. Clamp Retainer & Plunger 853-015130-002 MINI-MATCH,,LAM 9600 723-001205-006 SPACER RND .14 X .25 X .38 715-007469-102 LOWER ELECTRODE, 2 MIL HARD ANODIZED 715-003851-002 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 715-011006-002 PLATE SEALING GAP ADJUST DOUBLE PACKAGE 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136