Parts For Sale LAM 853-160288-001 LAM 853-160288-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-160288-001 Manufacturer LAM Part Number 853-160288-001 Description ASSY, GND Ring, Liner, SPCR, ACC Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 US Other LAM Parts 716-000941-001 Dispersion plasma plate 839-270652-001 LAM RESEARCH 839-270652-001 571-045788-002 LAM RESEARCH 571-045788-002 CDSO IGS GAS BOX 150 PSIG 810-025369-002 CHILLER RESISTIVITY 44XX 713-028553-103 RING, CONFINEMENT, VESPEL 839-101870-002 853-089988-115 LAM CABLE ASSY P/N 853-089988-115 , 684-121203-002, 684 ... 893-515602-002 NEW Qty.2 Omron E2E-X1R5E1 ASCB Sensor Assembly, Lam Res ... 719-159808-801 LAM RESEARCH 719-159808-801 RING 746-550229-001 BRG_BALL_UNFLANGED_OPEN 716-031453-002 RING FILLER LOWER CHAMBER 714-045743-809 Outer Liner