Parts For Sale LAM 853-160197-001 LAM 853-160197-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-160197-001 Manufacturer LAM Part Number 853-160197-001 Description Tilt switch Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 2.0 – Other LAM Parts 716-030135-001 Focus ring, 8" ESC 716-011623-001 Lam 4420 Lower Ring Clamp 716-011623-001 Rev.C 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 734-093789-001 Seal O-Ring Gate Chamber PCB 000-061 REV M 730-037464-04 PSY730 RBN CBL, CTI TO INTCNCT PNL INTERIOR 131052003 SHIM, MYLAR, 0.010 2301911 Drytek 384t ESC plasma arrester weldment. 716-160255-002 Chamber Plasma Quartz 754-091624-001 Spring Lower Plunger LAM 4520 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136