Parts For Sale LAM 853-160197-001 LAM 853-160197-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-160197-001 Manufacturer LAM Part Number 853-160197-001 Description Tilt switch Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 2.0 – Other LAM Parts 713-461173-003 LFTR, WFR, SGL PIN 734-007356-001 O-RING 8.50ID*0.125C/S VITON 2-268 734-007356-001 A4R1 R ... 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 716-800842-008 NSR,FOC R,SHLD 200MM 853-170245-001 ASSY PLASMA ARSR HE BCKSDE 715-009306-006 Ring Focus Aluminum 6" 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 246876-010 720-009531-010 SCREW, FLAT HEAD 714-045743-809 Outer Liner 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136