Parts For Sale LAM 853-15982-1 LAM 853-15982-1 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-15982-1 Manufacturer LAM Part Number 853-15982-1 Description AUTOTUNE BOX Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 720-016278-114 1/4-20 x 5/8" Slotted Pan Head Screw 839-020965-005 Assembly, Outer, .18 Step, 300M 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 853-015130-002 MINI-MATCH,,LAM 9600 723-001205-006 SPACER RND .14 X .25 X .38 839-011907-222 ELCTD,SI,8IN,LR,SM HOLE,LCR 716-443086-301 Ring H Edge Si SGL x TALL H Wall 8" 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 734-061280-395 LAM RESEARCH 734-061280-395 O-RING CHAMBER LID QTY-2 715-011622-001 LIFTERWAFER4PIN Application: R4728 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136