Parts For Sale LAM 853-15982-1 LAM 853-15982-1 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-15982-1 Manufacturer LAM Part Number 853-15982-1 Description AUTOTUNE BOX Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 713-028485-001 bolt electrode ring clamp KELF For: LAM 839-360174-001 LAM RESEARCH (LAM) 839-360174-001 WELDMENT 853-015130-002 MINI-MATCH,,LAM 9600 723-001205-006 SPACER RND .14 X .25 X .38 713-032592-001 PLU, OT CL, DO MT, OP CHM 839-350005-001 839-350005-001 Lam Research Lower Match Helium Weldment ... 716-069688-002 Silicon 730-037464-04 PSY730 RBN CBL, CTI TO INTCNCT PNL INTERIOR 131052003 SHIM, MYLAR, 0.010 714-045743-809 Outer Liner 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136 715-014556-013 Drilled VCR Gasket