Parts For Sale LAM 853-15982-1 LAM 853-15982-1 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-15982-1 Manufacturer LAM Part Number 853-15982-1 Description AUTOTUNE BOX Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 796-029684-421 VLV,NC,1 MN,2 BYP,5RA,316L, CER INJ 715-018991-208 ELECTRODE, ALUMINUM ANODIZE 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 716-028249-064 RING,FOCUS,CER,LWR,MJR,FLAT,9600SE 853-015130-002 MINI-MATCH,,LAM 9600 605-012620-001 PCB,INDEX,DUAL SNSR,ASYSI 723-001205-006 SPACER RND .14 X .25 X .38 734-061280-278 O-RING (PACK OF 10) 724-077075-002 VACUUM ROBOT PICK 768-090914-001 SWITCH, VACUUM 131052003 SHIM, MYLAR, 0.010 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136