Parts For Sale LAM 853-15982-1 LAM 853-15982-1 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-15982-1 Manufacturer LAM Part Number 853-15982-1 Description AUTOTUNE BOX Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 716-030135-001 Focus ring, 8" ESC 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 716-140118-001 RING,FOC ESC 8" DOUBLE PACKAGE 713-021725-001 PAD, INSERT WAFER HOLDER, 5641-0162-SC513 CHEMRAZ 713-02 ... 856-010350-001 KIT, RETO CLAMP PLUNGER EZ WA 720-092758-010 Screw 713-021268-001 Pin Clamp Alignment Base 716-800842-008 NSR,FOC R,SHLD 200MM 28-8875-014 Quad Micro Stepper PCB OnTrak 28-8875-014 LAM 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 853-002751-001 POWER, SUPPLY, 5V