Parts For Sale LAM 853-15130-002 LAM 853-15130-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-15130-002 Manufacturer LAM Part Number 853-15130-002 Description LRC Mini-Match, Rainbow Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 2.0 US Other LAM Parts 854-023591-001 854-023591-001 BEARING ASSY SPHERICAL BEARING 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 713-021725-001 PAD, INSERT WAFER HOLDER, 5641-0162-SC513 CHEMRAZ 713-02 ... 856-010350-001 KIT, RETO CLAMP PLUNGER EZ WA 715-495014-001 LINER CHAMBER TRNSN 31-0010-003 CYLINDER 716-800842-008 NSR,FOC R,SHLD 200MM 734-093789-001 Seal O-Ring Gate Chamber 853-801879-004 CABLE, DC PWR ESC ASSY 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 716-330045-004 Ring edge, ,8' notched, shadow ring, ,ESC