Parts For Sale LAM 853-15130-002 LAM 853-15130-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-15130-002 Manufacturer LAM Part Number 853-15130-002 Description LRC Mini-Match, Rainbow Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 2.0 US Other LAM Parts 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 853-015130-002 MINI-MATCH,,LAM 9600 716-018614-081 Focus Ring 723-001205-006 SPACER RND .14 X .25 X .38 810-802902-208 LAM 810-802902-208 NODE2 Mother Board, PCB, FAB 710-8029 ... 839-330303-001 Weldment Elbow Fitting Gas Gap Fixed 723-007749-001 Spacer Shaft 1/4"OD 724-077075-002 VACUUM ROBOT PICK 734-091993-001 O-Ring Flouro Silicon Window Quartz 131052003 SHIM, MYLAR, 0.010 853-012230-002 GATE, INNER, DOOR 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136