Parts For Sale LAM 853-15130-002 LAM 853-15130-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-15130-002 Manufacturer LAM Part Number 853-15130-002 Description LRC Mini-Match, Rainbow Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 2.0 US Other LAM Parts 716-330121-001 LAM, 716-330121-001, Window Shaped Ceramic FXD GAPNWindo ... 853-015130-002 MINI-MATCH,,LAM 9600 839-016641-002 WELDMENT, INJECTOR GAS NOZZLE 723-001205-006 SPACER RND .14 X .25 X .38 853-012200-002 Inner Gate Assembly (Fully with order) includes: air ... 853-330282-001 PCB 000-061 REV M 734-090977-001 O-RING, 7/16 ID X .188 VITON 730-037464-04 PSY730 RBN CBL, CTI TO INTCNCT PNL INTERIOR 131052003 SHIM, MYLAR, 0.010 714-045743-809 Outer Liner 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136