Parts For Sale LAM 853-15130-002 LAM 853-15130-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-15130-002 Manufacturer LAM Part Number 853-15130-002 Description LRC Mini-Match, Rainbow Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 2.0 US Other LAM Parts 716-021883-001 Gasket 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 853-015130-002 MINI-MATCH,,LAM 9600 746-000220-001 Bearing 723-001205-006 SPACER RND .14 X .25 X .38 734-092560-154 O-Ring FLUORSILICONE 94, 92X2, 62 LOWE ESC 853-801879-004 CABLE, DC PWR ESC ASSY 724-077075-002 VACUUM ROBOT PICK 718-094523-261 ASSY, ELCTD,ESC 6" MJR FLT LT 716-011427-001 DSQ Quartz Window 131052003 SHIM, MYLAR, 0.010 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136