Parts For Sale LAM 853-140051-101 LAM 853-140051-101 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-140051-101 Manufacturer LAM Part Number 853-140051-101 Description C/w 853-027430-002 & 853-027430-001 Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 2.0 – Other LAM Parts 715-018991-208 ELECTRODE, ALUMINUM ANODIZE 713-057586-001 PLUG,RTD,THRM CTRL PL 853-370186-001 CABLE OVERTEMP 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 715-011986-138 (modified) Cap, Lower Electrode, 8" Mil Groove, No Polish Modified 716-800842-008 NSR,FOC R,SHLD 200MM 734-093789-001 Seal O-Ring Gate Chamber 724-077075-002 VACUUM ROBOT PICK 810-077433-001 ASSY,PCB VME OPTICAL EXTENDER 810-017034-005 PCB, CPU 734-009020-001 O-RING VITON AS267 209,14X3,53; 8.234 ID X 0.139 C/S;