Parts For Sale LAM 853-092664-001 LAM 853-092664-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-092664-001 Manufacturer LAM Part Number 853-092664-001 Description ASSY, SENSOR WAFER A/EX1 Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 716-021323-002 Quartz Funnel DSQ Chamber 853-015130-002 MINI-MATCH,,LAM 9600 723-001205-006 SPACER RND .14 X .25 X .38 853-012176-006 ASSY WAFER HOLDER TIGHT POCKET, 6" PCB 000-061 REV M 730-037464-04 PSY730 RBN CBL, CTI TO INTCNCT PNL INTERIOR 715-008787-001 PLATE, BAFFLE 0.040 131052003 SHIM, MYLAR, 0.010 12-8892-012 SWITCH, CASS ASSY 790-006301-001 Lifter Chamber Back-up 810-017031-004 ASSY, PCB, ADIO-AO INSTALLATION POSSIBLE ON: RAINBOW 4520 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136