Parts For Sale LAM 853-092664-001 LAM 853-092664-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-092664-001 Manufacturer LAM Part Number 853-092664-001 Description ASSY, SENSOR WAFER A/EX1 Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 716-007136-011 Ring Quartz Upper HPT 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 13-8082-291 BUMPER NEST STD0FF 853-015130-002 MINI-MATCH,,LAM 9600 716-330355-001 WINDOW, QUARTZ, HTD-EP 723-001205-006 SPACER RND .14 X .25 X .38 839-460152-006 LAM RESEARCH 6" HEATER 839-460152-006 724-077075-002 VACUUM ROBOT PICK 716-330915-001 ESC Insulator Ring 9408 Poly VAT 65 131052003 SHIM, MYLAR, 0.010 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136 715-330406-003 Retaining Clamp