Parts For Sale LAM 853-092664-001 LAM 853-092664-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-092664-001 Manufacturer LAM Part Number 853-092664-001 Description ASSY, SENSOR WAFER A/EX1 Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 734-007369-001 O-RING ARM POST QUAD SEAL,VITON 734-007369-001 A4R1 RAIN ... 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 713-021725-001 PAD, INSERT WAFER HOLDER, 5641-0162-SC513 CHEMRAZ 713-02 ... 856-010350-001 KIT, RETO CLAMP PLUNGER EZ WA 853-032776-001 ASSEMBLY PADDLE LIFTER 716-140432-061 QUARTZ RETAINING RING 839-800327-315 Etch FLEX Talon Ect. LAM 2300 ESC 300mm 746-000220-001 Bearing 716-800842-008 NSR,FOC R,SHLD 200MM 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 857-065064-004 Etch FLEX Talon Ect. LAM 2300 ABE Gaskets