Parts For Sale LAM 853-080254-001 LAM 853-080254-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-080254-001 Manufacturer LAM Part Number 853-080254-001 Description ASSY, WFR ARM, 200MM, ASIQ, 384T Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 713-011578-001 SLEEVE, PLUNGER GUIDE 713-057586-001 PLUG,RTD,THRM CTRL PL 853-017648-001 853-370186-001 CABLE OVERTEMP 716-331088-001 Quartz Top Edge Ring, 8" ESC 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 716-800842-008 NSR,FOC R,SHLD 200MM 810-017004-001 Lam Research 4420 Solenoid Interlock Board 810-017004-00 ... 724-077075-002 VACUUM ROBOT PICK 734-091993-001 O-Ring Flouro Silicon Window Quartz 716-140139-211 Ring hot edge, hiwall, ESC8"