Parts For Sale LAM 853-080189-001 LAM 853-080189-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-080189-001 Manufacturer LAM Part Number 853-080189-001 Description ASSY, CA, HI V, ESC, 384T Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other LAM Parts 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 678-009953-150 Heater cartridge 150w 716-330504-064 ESC Focus Ring (Modified--Regrind) 6" 853-015130-002 MINI-MATCH,,LAM 9600 853-031764-004 7890 LAM RESEARCH LOWER ELECTRODE, ESC, FIXED GAP (PARTS ... 734-007744-001 O-RING VITON 431.80X3.53 CALIFORNIA SEAL 734-007744-001 723-001205-006 SPACER RND .14 X .25 X .38 724-077075-002 VACUUM ROBOT PICK 734-091993-001 O-Ring Flouro Silicon Window Quartz 131052003 SHIM, MYLAR, 0.010 853-017435-001 PCB 4-PIN LIFTER FILTER 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136