Parts For Sale LAM 853-064861-004 LAM 853-064861-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-064861-004 Manufacturer LAM Part Number 853-064861-004 Description ASSY, AUX PC Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 US Other LAM Parts 713-011578-001 SLEEVE, PLUNGER GUIDE 839-270652-001 LAM RESEARCH 839-270652-001 716-140432-061 QUARTZ RETAINING RING 571-045788-002 LAM RESEARCH 571-045788-002 CDSO IGS GAS BOX 150 PSIG 716-011564-001 6" DFP-2 UPPER ELECTRODE DOUBLE PACKAGE 720-009530-016 Slotted Flat Head, KEL-F 1/4-20 x 1" 839-101870-002 853-089988-115 LAM CABLE ASSY P/N 853-089988-115 , 684-121203-002, 684 ... 893-515602-002 NEW Qty.2 Omron E2E-X1R5E1 ASCB Sensor Assembly, Lam Res ... 719-159808-801 LAM RESEARCH 719-159808-801 RING 853-491592-001-A-3117 Removed from Lam Alliance A-4 chamber. Complete assembly ... 739-007783-001 Seal Quad Q4454