Parts For Sale LAM 853-062298-001 LAM 853-062298-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-062298-001 Manufacturer LAM Part Number 853-062298-001 Description CA,SIG,VME/HDW INTLK/HTD WDO INTLK Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 JP Other LAM Parts 716-140118-001 RING,FOC ESC 8" DOUBLE PACKAGE 713-057586-001 PLUG,RTD,THRM CTRL PL 853-370186-001 CABLE OVERTEMP 723-001205-006 SPACER RND .14 X .25 X .38 734-09119-001 LAM Research 734-09119-001 839-101870-002 716-800842-008 NSR,FOC R,SHLD 200MM 742-443232-005 GSKT, EMI, SST, O-RING, LOW FORCE 765-007787-001 SPROCKET DRIVE 2.873PD.500B 715-360197-001 GASKET, 1/2VCR DRILLED .013 CENTER HOLE 724-077075-002 VACUUM ROBOT PICK 716-028627-104 BAFFLE,SIC,6" XL,LRC,716-028627-104