Parts For Sale LAM 853-046178-002 LAM 853-046178-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-046178-002 Manufacturer LAM Part Number 853-046178-002 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 US Other LAM Parts 716-011580-246 Lam 4" Plate wafer clamp. PN 716-011580-246 . 713-057586-001 PLUG,RTD,THRM CTRL PL 810-068158-014 Lam Research 810-068158-014 NODE ROBOT INTERFACE BOARD 853-370186-001 CABLE OVERTEMP 810-015987-101 BOARD R PCB 716-140163-261 Ring Hot Edge 15 DEG ESC STD 6" 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 716-800842-008 NSR,FOC R,SHLD 200MM 716-330504-081 Ring ,focus ,8' ,flatted GDR ESC ,ceramic 724-077075-002 VACUUM ROBOT PICK 715-038653-004 ESC cooling ring (needs re-anodised)