Parts For Sale LAM 853-032018-005 LAM 853-032018-005 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-032018-005 Manufacturer LAM Part Number 853-032018-005 Description UPR MATCH BOX ASSY Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 660-242291-001 ASTRON i, AX7670 MKS PN. AX7670-83 LAM PN. 660-242291-00 ... 716-140118-001 RING,FOC ESC 8" DOUBLE PACKAGE 713-057586-001 PLUG,RTD,THRM CTRL PL 853-370186-001 CABLE OVERTEMP 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 716-800842-008 NSR,FOC R,SHLD 200MM 715-801916-808 PLD GAS DIST 300MM W/G RV HTR 716-021886-002 O-RING, BELL JAR PFE 724-077075-002 VACUUM ROBOT PICK 715-006602-001 HOUSING SEAL QUALRIM 716-031453-002 RING FILLER LOWER CHAMBER