Parts For Sale LAM 853-032018-005 LAM 853-032018-005 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-032018-005 Manufacturer LAM Part Number 853-032018-005 Description UPR MATCH BOX ASSY Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 853-130027-001 716-330504-061 Ring,FOC 150mm,ESC,GD Ring 713-057586-001 PLUG,RTD,THRM CTRL PL 716-140069-002 Clamp Attachment Plate,ESC,150mm 853-370186-001 CABLE OVERTEMP 716-011573-001 Ceramic Plunger 1/4 Turn OEM# 716-011573-001 CPN: ML-43224 723-001205-006 SPACER RND .14 X .25 X .38 839-014757-067 Weldment 839-014757-067 Flex Gas Feed Line 1/4" 839-101870-002 716-800842-008 NSR,FOC R,SHLD 200MM 771-090453-001 Convectron tube 1/4" VCR fitting DELIVERY WITH LAM CABLE ... 724-077075-002 VACUUM ROBOT PICK