Parts For Sale LAM 853-031498-001 LAM 853-031498-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-031498-001 Manufacturer LAM Part Number 853-031498-001 Description ASSY HEATER CARTRIDGE 100 WATTS (LOWER C Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 716-140139-213 RING, HOT EDGE, HI WALL, ESC 8" 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 720-009531-004 Screw, Kel-F flathead 6/32*1/4 716-330504-064 ESC Focus Ring (Modified--Regrind) 6" 853-015130-002 MINI-MATCH,,LAM 9600 723-001205-006 SPACER RND .14 X .25 X .38 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 716-012639-024 NOZZLE, INJ. 8X, .055-45DEG RDL-1CTR 716-160255-002 Chamber Plasma Quartz 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136 715-011912-083 PLATE BAFFLE UPPER 8.3 44XX