Parts For Sale LAM 853-031469-004 LAM 853-031469-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-031469-004 Manufacturer LAM Part Number 853-031469-004 Description OLD P/N 853-031469-001 Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other LAM Parts 716-028123-003 RING, FILLER, CERAMIC, HI-C DOUBLE PACKAGE 716-011564-001 6" DFP-2 UPPER ELECTRODE DOUBLE PACKAGE 810-017030-005 ASSY PCB, GAS PANEL 839-101870-002 PCB 000-061 REV M 893-515602-002 NEW Qty.2 Omron E2E-X1R5E1 ASCB Sensor Assembly, Lam Res ... 853-015130-002-M-3609 716-031257-531 Ring Edge Top Quartz EBP 300mm 739-900064-002 QUAD SEAL .070 ID PERIMETER 810-71082-004 Lam Research 810-17082-004 16 Channel Heater Control Boa ... 716-330045-004 Ring edge, ,8' notched, shadow ring, ,ESC 853-015130R204-E-ELM